TOC-1000e S

In semiconductor manufacturing, ultrapure water is produced from a variety of water sources, and impurities must be removed as thoroughly as possible during purification. Urea is especially challenging because it is difficult to oxidize, yet even trace amounts can generate ammonia gas and cause issues in the machining of semiconductor materials. Conventional online TOC analyzers with similar operating principles have often struggled to detect these compounds with sufficient sensitivity. The TOC-1000e S addresses this challenge with an excimer lamp and Shimadzu’s Active-Path configuration, which expose the sample to high-energy shortwave light for highly sensitive detection of urea and other hard-to-oxidize organic compounds. Its mercury-free excimer lamp technology also supports a 12-month maintenance interval, with maintenance and re-calibration performed on-site to help reduce service effort and keep operations running smoothly.

The TOC-1000e S combines a compact footprint with a lightweight 3 kg design, offering maximum installation flexibility for continuous online water quality monitoring. When contamination occurs, its portability makes it easy to move between key control points in the plant, helping users quickly trace the source of the issue. With support for desktop or wall/pipe mounting using an optional bracket kit, as well as easy on-site calibration with an optional vial sampler, the TOC-1000e S delivers both mobility and convenience without compromising performance.